View PDFLam Research Corporation To Host Technical Symposium At Semicon West; Focus Will Be Enabling Technologies For Critical Applications FREMONT, Calif., July 10, 1998 - Lam Research Corporation (Nasdaq: LRCX), a leading supplier of wafer fabrication equipment to the worldwide semiconductor industry, will host a one-day technical symposium during SEMICON® West. Symposium talks will be presented on enabling technologies for critical applications, such as dual damascene etch and copper CMP. The symposium will be held on July 14, 1998, at the San Francisco Hilton and Towers Hotel in San Francisco, Calif.
The speakers will include leading technologists from Hewlett-Packard, IBM Corporation, IMEC, Lucent Technologies, Matsushita Electronics, Novellus Corporation, and Texas Instruments. Topics will cover low k dielectric etch, dual damascene patterning, nano gate structure etch with ultrathin oxides, CMP and clean for STI applications, copper CMP and clean, and 300 mm development. Examples of important development work being presented include:
- Patrick Martin of Texas Instruments will discuss self-aligned dual damascene etch on Lam’s 4520XLETM advanced dielectric etch system.
- IBM’s Peter Biolsi will present high-volume production data compiled from using the 4520XLE.
Serge Vanhaelemeersch from IMEC will be presenting on low k etch development using Lam’s TCPTM 9100PTX high-density dielectric etch system.
“This important symposium brings together in one location industry leaders to discuss the most urgent development issues facing semiconductor manufacturing today and provides a forum for presenting innovative solutions,” commented Alex Voshchenkov, Lam’s senior vice president and chief technical officer.
Lam Research Corporation is a leading supplier of wafer fabrication equipment and services to the world’s semiconductor industry. The company provides processing solutions for dry etch, chemical mechanical planarization (CMP), and post CMP wafer clean, three essential steps in the fabrication of integrated circuits. Lam’s headquarters are located in Fremont, California. The company’s common stock trades on the Nasdaq National Market under the symbol LRCX. Lam’s World Wide Web address is http://www.lamrc.com.