Lam Research Corporation To Show Innovative Productivity And Copper Interconnect Solutions At Semicon Japan
December 01, 1998

Lam Research Corporation To Show Innovative Productivity And Copper Interconnect Solutions At Semicon Japan FREMONT, Calif., December 1, 1998 - Lam Research Corporation (Nasdaq: LRCX), a leading supplier of wafer fabrication equipment to the worldwide semiconductor industry, today announced that it will highlight innovative productivity and copper interconnect solutions at SEMICON® Japan in Hall 1, Booth A903. The show runs December 2-4, 1998, at Makuhari Messe in Japan.

Lam will display its TeresTM integrated CMP and clean system and the TCPTM 9400PTX poly and 4520XLETM dielectric etch modules on the high-productivity AllianceTM platform. Multimedia programs will demonstrate etch, CMP and cleaning processes.

Lam will also host a technical symposium on December 3 at the Hotel New Otani, featuring presentations from Lam technologists and customers on etch, CMP, and cleaning applications and challenges, as well as copper processing.

Lam’s 4520XLETM dielectric etch system is capable of etching all proposed dual damascene structures for sub-0.l8 micron, providing the flexibility needed for developing copper processes. Lam’s integrated Teres CMP system uses Linear Planarization TechnologyTM with a planarization efficiency three times greater than conventional methods - a significant advantage in planarizing copper. The high-productivity TCP 9400PTX etch system is optimized for demanding applications such as advanced poly/polycide gate etch and shallow trench isolation for 0.18 and 0.15 micron technology.

According to Yoichi Isago, president of Lam Research Co., Ltd., "SEMICON Japan provides the opportunity to demonstrate Lam’s productivity advantages in etch, CMP, and clean, and to show our Japanese customers our copper interconnect solutions."

Lam Research Corporation is a leading supplier of wafer fabrication equipment and services to the world’s semiconductor industry. Lam’s headquarters are located in Fremont, California. The company’s common stock trades on the Nasdaq National Market under the symbol LRCX. Lam’s World Wide Web address is

"Safe Harbor" Statement under the Private Securities Litigation Act of 1995: Except for historical information, this press release contains certain forward-looking statements and other prospective information relating to future events, including, but not limited to, statements relating to the release of new products, product performance and current and future applications, the company’s participation in the semiconductor equipment market, and etch market segment specifically, and the current and future significance of certain technology. These statements and other information are subject to various risks, uncertainties and changes in condition, significance, value and effect that could cause results to differ materially and in ways not readily foreseeable, including, but not limited to, a continued downturn in the semiconductor equipment market, competition, development or acceptance of new products or product technologies, challenges to existing or anticipated technology rights, and other risks detailed from time to time in the company’s SEC reports, including the report on Form 10-K for the year ended June 30, 1998, and the Form 10-Q for the quarter ended September 30, 1998. The company assumes no obligation to update the information in this press release.