Lam Research Corporation Gaining Momentum In Metal Etch With Multiple Wins
February 26, 1999

Lam Research Corporation Gaining Momentum In Metal Etch With Multiple Wins FREMONT, Calif., February 16, 1999 - Lam Research Corporation (Nasdaq: LRCX), a leading supplier of wafer fabrication equipment to the worldwide semiconductor industry, today announced multi-system orders for its high-throughput TCPTM 9600PTX high-density metal etch system. Orders are from several major global companies, including Taiwan and Singapore foundries, Korean and Japanese DRAM manufacturers, and European and U.S. logic manufacturers.


Through superior wafer handling design and achievement of high rate etching, the TCP 9600PTX has consistently demonstrated higher throughput with 45 wafers per hour (WPH) compared to 35 WPH for the competition. Higher throughput coupled with lower consumable expense leads to a dramatically lower cost of ownership.

“We are engaged in a relentless pursuit to drive down the cost of ownership for our customers,” stated Greg Campbell, Lam’s vice president and general manager of the Etch Products Organization. “The TCP 9600PTX system has been qualified at multiple customer sites for 0.18 micron aluminum etch and we have demonstrated 0.13 micron capability.”

Lam Research Corporation is a leading supplier of wafer fabrication equipment and services to the world’s semiconductor industry. Lam’s headquarters are located in Fremont, California. The company’s common stock trades on the Nasdaq National Market under the symbol LRCX. Lam’s World Wide Web address is

“Safe Harbor” Statement Under the Private Securities Litigation Act of 1995: This press release contains certain forward-looking statements which are subject to the Safe Harbor provisions created by the Private Securities Litigation Reform Act of 1995. Such forward-looking statements relate to anticipated product shipments under existing orders, shipment schedules, the prospective demand for the company’s products, acceptance and competitiveness of the company’s products and market transition to new processes. Such statements are based on current expectations and are subject to risks, uncertainties, and changes in condition, such as a continued downturn in the semiconductor equipment market affecting existing orders and shipment schedules, and other risks detailed in documents filed with the Securities and Exchange Commission, including specifically the report on Form 10-K for the year ended June 30, 1998, and the Form 10-Q for the quarter ended September 30, 1998. The company undertakes no obligation to update the information in this Press Release.