View PDFLam Research Corporation To Host Seminar In France On Advances In Clean/CMP Processes And Techniques FREMONT, Calif., Sept. 24, 1999 - Lam Research Corporation (Nasdaq: LRCX), a leading supplier of front-end wafer processing equipment to the worldwide semiconductor manufacturing industry, today announced the company will host a Clean/CMP Technical Exchange on September 29-30, 1999, in Saint-Cyr-sur-Mer, France. An industry first, the meeting will highlight the latest CMP and cleaning technologies as understood by leading researchers and semiconductor manufacturing technologists. The seminar will feature an interactive format to stimulate discussion of the technologies of today and the future.
The program will highlight the practical challenges of current as well as emerging cleaning technologies for post-CMP, as well as other applications. In addition, the seminar will review recent results and applications of CMP to copper damascene, shallow trench isolation (STI), and inter-level dielectric (ILD). Speakers from the U.S., Belgium, The Netherlands, and France will include representatives of Rensselaer Polytechnic Institute (New York), STMicrolectronics, Alcatel, IMEC, Philips Semiconductor, Infineon, and Lam’s development team.
“This seminar meets our customers’ needs for an open technology forum to discuss issues facing process engineers as they transition to sub-0.18 µm device integration. With Lam’s production-proven TeresTM and industry-leading clean products (SynergyTM and Synergy IntegraTM), we are well positioned to act as a catalyst to promote technology exchanges and assist customers in reaching their current and future performance goals,” stated Dr. Willy Krusell, vice president, CMP/Cleaning Engineering/Technology for Lam.
Process engineers, research scientists, fab managers, CMP and clean section managers, and others with an interest in the emerging technical CMP and clean roadmap will benefit by attending the seminar.
Lam Research Corporation is a leading supplier of wafer fabrication equipment and services to the world’s semiconductor industry. The company’s common stock trades on the Nasdaq National Securities Market under the symbol LRCX. Lam’s World Wide Web address is http://www.lamrc.com.