Lam Research Corporation Receives Editors’ Choice Best Product Award For TeresTM Integrated CMP System With LPTTM
November 02, 1999

Lam Research Corporation Receives Editors’ Choice Best Product Award For TeresTM Integrated CMP System With LPTTM FREMONT, Calif., November 2, 1999 - Lam Research Corporation (Nasdaq: LRCX) today announced receipt of Semiconductor International’s Editors’ Choice Best Product Award, which recognizes production-proven products, for its Teres-integrated CMP system. The system is currently in 0.18 micron shallow trench isolation (STI) production for the AthlonTM processor at Advanced Micro Devices’ (AMD) leading-edge Fab 25 in Austin, Texas. Teres also was recently named “production tool of record” for 0.18 micron copper CMP processes at Taiwan Semiconductor Manufacturing Company (TSMC), the world’s largest semiconductor foundry.


Established in 1989, the Editors’ Choice Award program recognizes superior performance of semiconductor and related equipment, which has advanced wafer processing in a production environment. Products are nominated by users, and nominations are validated under strict confidentiality to ensure candid opinions regarding product performance.

“Since its introduction, Teres has exceeded industry standards and set new benchmarks for fast start-up times, low consumable costs, reliability at launch and process performance at the world’s leading semiconductor manufacturers,” said Dr. Willy Krusell, vice president, CMP/Clean Engineering/Technology at Lam. “This award further confirms the product’s position as the precursor of a new era in CMP processing.”

“In the production environment, Teres has shown significant advantages in system uptime and reliability,” commented Dr. Chris Raeder, member of the technical staff at AMD’s Fab 25. “The system’s exceptional pattern insensitivity enabled AMD to eliminate the reverse mask in our STI process, greatly reducing wafer costs. In addition, the ability to tune Teres’ polish profile has provided AMD with greater flexibility in our process development,” Raeder concluded.

“Collecting a group of candidates from which we select the 20 winners is a year-round effort,” noted Semiconductor International associate editor John Baliga. “The Editors’ Choice Best Products Award program differs from traditional magazine award competitions in that products are nominated by users, not people who make or sell them. We get input from multiple users for each product to verify that each has successfully shown superior performance in semiconductor manufacturing.”

“Safe Harbor” Statement Under the Private Securities Litigation Act of 1995: This press release contains certain forward-looking statements which are subject to the Safe Harbor provisions created by the Private Securities Litigation Reform Act of 1995. Such forward-looking statements relate to anticipated product performance, acceptance and competitiveness of the company’s products and market transition to new processes. Such statements are based on current expectations and are subject to risks, uncertainties, and changes in condition, such as such as may arise from introduction of such products into production and their ability to perform consistent with expectations, and other risks detailed in documents filed with the Securities and Exchange Commission, including specifically the report on Form 10-K for the year ended June 30, 1999, and the Form 10-Q for the quarter ended March 27, 1999. The company undertakes no obligation to update the information in this Press Release.

For Semiconductor International: Semiconductor International, published by Cahners Business Information and a part of Reed Elsevier’s global array of technical publications is the leading technical publication reaching and covering the global semiconductor industry. LSI boasts the industry’s largest and most experienced full-time technical editorial team, and has the largest circulation to semiconductor manufacturers of any industry publication. Additional information about SI and it’s many products and activities are available at

For Lam Research Corporation: Lam Research Corporation is a leading supplier of front-end wafer processing equipment and services to the worldwide semiconductor manufacturing industry. The company’s common stock trades on the Nasdaq National Market under the symbol LRCX. Lam’s World Wide Web address is