Press Releases

Lam Research Corporation Wins $25 Million Etch Order From Silterra Malaysia SDN. BHD. FREMONT, Calif., March 28, 2000 - Lam Research Corporation (Nasdaq: LRCX) today announced a $25 million order for multiple etch systems. The order from Silterra Malaysia Sdn. Bhd. in Kulim, Malaysia, spans dielectric, metal, and poly etch systems and will enable Silterra to copy-exact proven 0.18-micron LSI Logic processes through a licensing agreement. In addition, these systems are extendible to 0.13-micron, providing essential capability for Silterra's rapid migration to smaller geometries.

Silterra's order includes multiple Exelan^TM dielectric and TCP^® 9400PTX poly etch systems as well as TCP 9600PTX metal etch systems. Silterra offers 180 nm multi-level metalization processes with the advanced capability of low-k dielectric. The company plans to migrate quickly to sub-150 nm processes.

"In addition to broad application flexibility in the same chamber configuration and extendible technologies, Lam's etch product lines are specifically designed for low cost of ownership. Our systems also include proprietary design features that stabilize chamber conditions for excellent process repeatability and control," stated Stephen G. Newberry, president of Lam.

"This low-cost process flexibility and stability directly addresses the challenging needs of fast-ramping factories like Silterra that must quickly adapt to varying product flows. Attainment of Silterra's aggressive goal to be fully operational in Q4 2000, ramping to 30,000 eight-inch wafers per month, requires highly flexible, extendible, proven equipment," Newberry continued.

Through a technology licensing agreement with LSI Logic Corp. (NYSE: LSI), Silterra will install the Lam equipment to run LSI Logic's standard 250 nm and 180 nm gate geometry processes. The technology will be transferred from LSI's Gresham, Oregon, facility which also uses Lam etchers.

To assist with the transfer, Lam is providing dedicated on-site support, equipment service, and spare parts management to help Silterra ramp up. According to K.C. Ang, Silterra's vice president of operations, "Lam has proven its technical capability and excellence in support at LSI. This purchase builds on that success, and we are confident we will meet our aggressive schedule."

This press release contains certain forward-looking statements which are subject to the Safe Harbor provisions created by the Private Securities Litigation Reform Act of 1995. Such forward-looking statements relate to anticipated performance, acceptance, capabilities, applications, and competitiveness of the company's products and market transition to new processes. Such statements are based on current expectations and are subject to risks, uncertainties, and changes in condition, such as may arise from introduction of such products into production and their ability to perform consistent with current expectations and other risks detailed in documents filed with the Securities and Exchange Commission, including specifically the report on Form 10-K for the year ended June 30, 1999, and the Form 10-Q for the quarter ended December 26, 1999. The company undertakes no obligation to update the information in this Press Release.

Lam Research Corporation is a leading supplier of wafer fabrication equipment and services to the world's semiconductor industry. Lam's headquarters are located in Fremont, California. The company's common stock trades on the Nasdaq National Market under the symbol LRCX. Lam's World Wide Web address is http://www.lamrc.com.

About Silterra Malaysia Sdn. Bhd. Founded in December of 1997, Silterra Malaysia Sdn. Bhd. is a full-service semiconductor manufacturing provider that offers customers leading-edge process technologies. Silterra's factory will be operational in 1Q 2001, ramping to 30,000 eight-inch wafers per month by 2002. Silterra will have immediate access to LSI Logic's capacity on the license technologies to qualify and develop customers. Silterra is headquartered in Kulim, Malaysia, with a sales and marketing office in Sunnyvale, California. For further information on Silterra or its services, visit http://www.silterra.com.