Lam Research Corporation Names Kazuo Nojiri Chief Technology Officer For Lam Japan Co., Ltd.
May 04, 2000

Lam Research Corporation Names Kazuo Nojiri Chief Technology Officer For Lam Japan Co., Ltd. FREMONT, Calif.-May 4, 2000-Lam Research Corporation (Nasdaq: LRCX) today announced the appointment of Kazuo Nojiri as chief technology officer for Lam Research Japan Co., Ltd.

Nojiri, a 25-year veteran of the semiconductor industry, is known as a pioneer in the research field of charging damage. Prior to joining Lam, he held numerous management positions at Hitachi Ltd. At Hitachi, Nojiri began his career working on chemical vapor deposition (CVD) as it applies to MOS device technology. He has been engaged in the development of RIE and ECR etch technologies and developed ECR plasma etch technologies for deep-submicron ULSIs. In 1987, Nojiri published the first paper that explained the gate oxide breakdown mechanism during plasma processing.

Nojiri holds 28 patents, including five in the United States, in the field of semiconductor device processing. In 1989 he was awarded the Okouchi Memorial Prize for the development of ECR plasma etch technology. In 1994 he received an award from the Japan Society for the Promotion of Machine Industry for the development of a low temperature dry etch system. Nojiri is also a member of the Japan Society for Applied Physics.

"Nojiri has an excellent record of continued success in the semiconductor industry," said Yoichi Isago, president of Lam Research Japan. "His breadth of technical expertise and leadership in the industry significantly aids our ability to offer customers the best in technology and quality," Isago concluded.

Lam Research Corporation is a leading supplier of front-end wafer processing equipment and services to the worldwide semiconductor manufacturing industry. The company's common stock trades on the Nasdaq National Securities Market under the symbol LRCX. Lam's World Wide Web address is