Press Releases

Lam Research Corporation Ships 100th Exelan^TM Dielectric Etch Chamber To Samsung Electronics FREMONT, Calif., June 21, 2000-Lam Research Corporation (Nasdaq: LRCX) today announced shipping the 100th Exelan dielectric etch chamber to Samsung Electronics Company, Ltd., Korea. This milestone shipment validates Exelan's strong market acceptance worldwide.

Samsung is a long-standing partner with Lam and has a large installed base of etch systems. Exelan has been qualified for multiple dielectric etch applications, achieving the yield and productivity results required.

"This milestone substantiates Lam's success in Changing the Value Equation^TM, meaning we have effectively increased the performance-to-cost ratio with Exelan. Paired with the rapid market acceptance we are seeing, these indicators confirm we are right on target with Exelan's package of technical capabilities and cost advantages," added Stephen G. Newberry, Lam's president and COO.

Exelan is Lam's next-generation, dual frequency, dielectric etch system for processing advanced sub-0.18-micron devices. It delivers throughput exceeding 60 wph and the industry's lowest CoO. Exelan is used in volume production around the world for a broad range of applications, including copper damascene, spacer, contact, via, and in situ hard mask open steps. The system is also involved in a number of advanced process development projects involving critical contact and low-k at 0.15-micron geometries and beyond. Exelan provides superior reliability and system availability. Scheduled service and costs are the best among comparable systems.

This press release contains certain forward-looking statements, which are subject to the Safe Harbor provisions created by the Private Securities Litigation Reform Act of 1995. Such forward-looking statements include, without limitation, anticipated product shipments under existing orders, shipment schedules, the prospective demand for the company's products, acceptance and competitiveness of the company's products, our ability to transfer processes among different machines and facilities, and market transition to new processes. Such statements are based on current expectations and are subject to risks, uncertainties, and changes in condition and other risks detailed in documents filed with the Securities and Exchange Commission, including specifically the report on Form 10-K for the year ended June 30, 1999, and the Form 10-Q for the quarter ended March 26, 2000. The company undertakes no obligation to update the information in this Press Release.

Lam Research Corporation is a leading supplier of front-end wafer processing equipment and services to the worldwide semiconductor manufacturing industry. The company's common stock trades on the Nasdaq National Market under the symbol LRCX. Lam's World Wide Web address is http://www.lamrc.com.