Press Releases

Lam Announces Imec Order For Teres^TM CMP/Cleaning Systems And Joint Development Plans For 100-nm STI And Copper CMP Processes FREMONT, Calif., July 5, 2000-Lam Research Corporation (Nasdaq: LRCX) today announced an order for Teres CMP/cleaning systems from IMEC of Leuven, Belgium, a leading developer of advanced processes for semiconductor manufacturers worldwide. IMEC will partner with Lam to jointly develop 100-nm STI and copper CMP processes. The addition of Teres extends IMEC's successful development partnership with Lam for advanced etch processes.

Joint development work with IMEC will primarily target developing STI and copper CMP processes for first-stage 130-nm technology and explore Teres' capabilities for 100-nm processing. "We view Teres as a second-generation CMP tool that provides the required process performance to develop future-generation technologies," commented Serge Vanhaelemeersch, IMEC's director of the Advanced Deposition, Etch and CMP Technologies Department. "Teres also incorporates the On Trak^TM Synergy Integra^TM cleaner and cleaning experience which we believe is critical to copper CMP success. Coupled with IMEC's expertise in cleaning, we expect to leverage both companies' strengths," added Vanhaelemeersch.

"We are both excited and honored to partner with IMEC on developing these key next-generation CMP processes for the advanced process modules IMEC is developing. In addition, Teres process development can now benefit from the results of a full, integrated CMOS process, where electrical and other process results can be evaluated," stated Dr. Willy Krusell, Lam's vice president and general manager, CMP/Cleaning Business Group.

This press release contains certain forward-looking statements which are subject to the Safe Harbor provisions created by the Private Securities Litigation Reform Act of 1995. Such forward-looking statements include, without limitation, anticipated product shipments under existing orders, the results of future process development and joint development activities, the benefits of those activities, and the technical and market transition to new processes. Such statements are based on current expectations and are subject to risks, uncertainties, and changes in condition and other risks detailed in documents filed with the Securities and Exchange Commission, including specifically the report on Form 10-K for the year ended June 30, 1999, and the Form 10-Q for the quarter ended March 26, 2000. The company undertakes no obligation to update the information in this Press Release.

Lam Research Corporation is a leading supplier of front-end wafer fabrication equipment and services to the world's semiconductor industry. The company's common stock trades on the Nasdaq National Market under the symbol LRCX. Lam's World Wide Web address is http://www.lamrc.com.