View PDFFREMONT, Calif., Jun 24, 2008 (BUSINESS WIRE) -- Lam Research Corporation (NASDAQ:LRCX), a major supplier of semiconductor wafer fabrication equipment and services, today introduced the 2300 Versys Kiyo3x conductor etch series. Innovative Kiyo3x technologies deliver CD uniformity of 1 nm across the wafer, which provides enabling capability for managing the challenging CD and overlay budgets of emerging double patterning applications. Kiyo3x field-upgradeable options provide a flexible, cost-effective approach for addressing a rapidly diverging range of challenging etch applications, including high-k/metal gate, hardmask open, shallow trench isolation, and strained silicon.
"As the industry transitions to double patterning as a key enabler of advanced device scaling, etch plays an increasingly important role in pattern shrinking. With the Kiyo3x series, we have extended our market-leading conductor etch product family to provide better uniformity, productivity, and repeatability to enable a range of the most complex as well as emerging critical etch applications on our customers' technology roadmaps," said Richard A. Gottscho, Lam Research group vice president and general manager, Etch Businesses. "By providing these capabilities as a configurable set of upgrade options, we allow our customers to maximize the value of their capital investments."
As the third generation of the Kiyo(TM) product line, the new Kiyo3x series includes improvements in wafer temperature control that enable radial tuning for edge control and profile shaping. These improvements, coupled with enhanced reactor symmetry, result in CD uniformities of 1 nm, 3-sigma variation. With advanced, proprietary pre-coat and post-etch chamber clean techniques, every wafer sees the same environment for superior repeatability, as well as high uptime and yield. For complex film stacks such as high-k/metal gate, the Kiyo3x provides multi-film etch capability in a single chamber, which results in a 50-to-100 percent productivity advantage over a two-chamber approach.
Multiple Kiyo3x systems have been installed at major customer sites in regions worldwide to address a variety of emerging applications.
Editor Background:
Lam Research Corporation, one of Fortune magazine's "100 Fastest-Growing Companies" in 2006 and 2007, is a major supplier of wafer fabrication equipment and services to the world's semiconductor industry and market share leader in plasma etch. Lam Research's common stock trades on The NASDAQ Global Select Market(SM) under the symbol LRCX. Lam Research is a NASDAQ-100(R) company. For more information, visit our web site at www.lamresearch.com.
Statements made in this press release which are not statements of historical fact are forward-looking statements and are subject to the safe harbor provisions created by the Private Securities Litigation Reform Act of 1995. Such forward-looking statements relate, but are not limited, to process results, such as critical dimensions (CD), uniformity of results, repeatability of results, enabling capabilities, edge control and profile shaping, as well as the role of etch in pattern shrinking, the value recognized by our customers of their capital investments, the features and options of the Kiyo3x series, its uptime and yield characteristics and its productivity enhancements compared to two-chamber approaches. Some factors that may affect these forward-looking statements include: the processes used by our customers and by our competitors' customers, the progress of various technical solutions, the success of our competitors' strategies including their development of new technologies, and the technical challenges faced by us and our customers. These forward-looking statements are based on current expectations and are subject to uncertainties and changes in condition, significance, value and effect as well as other risks detailed in documents filed with the Securities and Exchange Commission, including specifically the report on Form 10-K for the year ended June 24, 2007, and Form 10-Q for the quarter ended March 30, 2008, which could cause actual results to vary from expectations. The Company undertakes no obligation to update the information or statements made in this press release.
SOURCE: Lam Research Corporation
Lam Research Corporation Jae Jun, 510-572-5048 Product Communications jae_yon.jun@lamresearch.com or MindWrite Communications Sandy Fewkes, 408-224-4024 sandy@mind-write.com
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