- |Sep 26, 2023|
Virtual fabrication is a powerful tool to perform sensitivity analysis and provide guidance for inline process spec control
- Pathfinding by process window modeling: Advanced DRAM capacitor patterning process window evaluation using virtual fabrication|Sep 22, 2022|
With continuous device scaling, process windows have become narrower and narrower due to smaller feature sizes and greater process step variability . A key task during the R&D stage of...
- |Feb 11, 2022|
Design of Experiments (DOE) is a powerful concept in semiconductor engineering research and development. DOEs are sets of experiments used to explore the sensitivity of experimental variables and...