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  • Shelly Miyasato, PhD
    Senior Technical Communications Manager at Lam Research
    AutoEtch photo
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    Jul 12, 2021
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    Back in 1981, Lam pioneered single-wafer plasma etch tools with its first product, the Lam AutoEtch 480 plasma etcher. Introduced as “a streamlined plasma etching system designed specifically...

  • Shelly Miyasato, PhD
    Senior Technical Communications Manager at Lam Research
    stock photo man speaking on stage
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    Jul 6, 2021
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    The IEEE International Interconnect Technology Conference (IITC) will be held July 6-9, 2021, as a hybrid event – virtual and in-person (Kyoto Research Park, Kyoto, Japan), with on-demand...

  • Shelly Miyasato, PhD
    Senior Technical Communications Manager at Lam Research
    stock photo man speaking on stage
    |
    Jun 14, 2021
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    Chip features continue to shrink to incredibly small dimensions and different device architectures are being devised to supply consumers with more powerful electronics. Atomic layer deposition...

  • Shelly Miyasato, PhD
    Senior Technical Communications Manager at Lam Research
    stock photo man speaking on stage
    |
    May 24, 2021
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    Engineers, scientists, and industry professionals will attend the 239th Electrochemistry Society (ECS) Meeting and the 18th International Meeting on Chemical Sensors (IMCS), held May 30 to June 3....

  • Shelly Miyasato, PhD
    Senior Technical Communications Manager at Lam Research
    stock photo man speaking on stage
    |
    Feb 16, 2021
    |

    The latest developments in patterning will be on stage at the upcoming SPIE Advanced Lithography, held as a digital forum February 22-26. Patterning – the set of steps that transfers chip...

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