This resource page is where you can find links to updated information on Lam’s cutting-edge technological innovations. We suggest that you bookmark this page and check back regularly.
Through precision etch and deposition systems—as well as state-of-the-art process control solutions—Lam’s advanced tools and technologies enable chip manufacturers to address the requirements for producing next-generation devices.
Everything You Need to Know About Aether®
Lam Research's Aether dry resist and development process uses a series of Lam tools before and after the extreme ultraviolet (EUV) lithography process to support smaller pitch sizes and create advanced patterns on semiconductor devices.
Everything You Need to Know About Akara®
Akara is the industry’s most advanced conductor etch technology to date, built on Lam’s two decades of market leadership in conductor etch and featuring unique plasma control capabilities.
Everything You Need to Know About ALTUS® Halo
ALTUS Halo is the world’s first atomic layer deposition (ALD) tool that harnesses the capabilities of the metal molybdenum in the production of leading-edge semiconductors.
Coronus DX®, World’s First Bevel Deposition Solution Optimized for 3D Chipmaking
This breakthrough bevel deposition tool helps improve chipmakers’ output by protecting the wafer bevel with a layer of protective film, helping to improve yield.
Cobots Lend a Much-Needed Hand for Error-Prone, Challenging Maintenance Tasks
Dextro™, the semiconductor industry’s first collaborative robot (cobot), is designed to handle maintenance tasks to support engineers and technicians working in the fab.
Mass Metrology Applications Grow With Vertical Scaling
Lam’s mass metrology tool Metior® is part of the Metryx® product family. It measures thick film stacks, high aspect ratio structures, and hidden etched features faster and more precisely than optical measurement.
Prestis® Is a Breakthrough for PiezoMEMS Devices
This pulsed laser deposition (PLD) system was developed to enable the deposition of high-quality aluminum scandium nitride (AlScN) films, which are essential to produce piezoMEMS devices (e.g., sensors, actuators, microphones, speakers).
Semiverse® Solutions Tackle the Semiconductor Industry’s Greatest Challenges
The Semiverse Solutions suite of computational products, including SEMulator3D® and VizGlow®, brings together Lam’s expertise in software development, simulation and modeling, data systems, and advanced analytics.
Everything You Need to Know About VECTOR® TEOS 3D
VECTOR TEOS 3D is Lam's latest game-changing deposition tool, designed for advanced semiconductor packaging that enables the production of ultra-thick, high-quality dielectric films essential for 3D chip stacking.