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- |Sep 6, 2016|
With the introduction of Lam’s latest Flex™ dielectric etch system, we have expanded our atomic layer etching (ALE) portfolio to include both conductor and dielectric etch. At the 10 nm...
- |Aug 29, 2016|
The semiconductor manufacturing community is gearing up for SEMICON Taiwan, the largest microelectronics event in Taiwan, which is expected to attract more than 40,000 visitors from around the...
- |Aug 23, 2016|
To thank our suppliers for their invaluable support and contributions, Lam recently hosted its Supplier Day with a focus on enhancing collaboration and renewing opportunities for mutual success....
- |Aug 9, 2016|
Addressing critical needs for next-generation 3D NAND and DRAM devices, Lam has developed the industry’s first all-atomic layer deposition (ALD) low-fluorine tungsten (LFW) fill process with its...
- |Aug 1, 2016|
Multiple patterning is an innovative approach to scaling semiconductors, but it also poses significant challenges controlling process variations. Lam’s Rick Gottscho, executive vice president of...